Share Email Print
cover

Proceedings Paper

Prototype of an excimer laser for microprocessing
Author(s): Leszek Iwanejko; Ludwik Jerzy Pokora; Wieslaw L. Wolinski
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The paper presents a brief description of a prototype of a XeC1 excimer laser for micraprocessing of materials. The planned main parameters of the laserare as follows: wavelength . . . . . . . . . . . . . . . . . . . . . . . . . 308 nm -''energyofapulse. . . . . . . . . . . . . lOOmJ -pulseduration (FWHM) . . . . . . . . . . . . . . . 2Ons repetition frequency . . . . . . . . . . . . . . 1O Hz peak power of a pulse . . . . . . . . . . . . . . . 5 MW With respect to currently carrried works with the prototype we show only preliminary results of testing of a laser head. The obtained maximum laser pulse energy exceeded 90 ml. However it should be pointed out that this value was obtained without any opt i mi z at i on of the 1 aser.

Paper Details

Date Published: 1 August 1991
PDF: 3 pages
Proc. SPIE 1391, Laser Technology III, (1 August 1991); doi: 10.1117/12.57189
Show Author Affiliations
Leszek Iwanejko, Institute of Plasma Physics and Laser Microfusion (Poland)
Ludwik Jerzy Pokora, Institute of Plasma Physics and Laser Microfusion (Poland)
Wieslaw L. Wolinski, Warsaw Technical Univ. (Poland)


Published in SPIE Proceedings Vol. 1391:
Laser Technology III
Wieslaw L. Wolinski; Bohdan K. Wolczak; Jerzy K. Gajda; Danuta Gajda; Ryszard S. Romaniuk, Editor(s)

© SPIE. Terms of Use
Back to Top