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Proceedings Paper

Influence of laser pulse annealing on the depth distribution of Sb recoil atoms in Si
Author(s): Irena Brylowska; K. Paprocki
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Paper Details

Date Published: 1 August 1991
PDF: 6 pages
Proc. SPIE 1391, Laser Technology III, (1 August 1991); doi: 10.1117/12.57188
Show Author Affiliations
Irena Brylowska, Maria Curie-Sklodowska Univ. (Poland)
K. Paprocki, Maria Curie-Sklodowska Univ. (Poland)


Published in SPIE Proceedings Vol. 1391:
Laser Technology III

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