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Proceedings Paper

Surface profile measurement using chromatic confocal microscopy
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Paper Abstract

We investigate lateral and axial chromatic confocal microscopy using supercontinuum white light, and its application to surface profile measurement. In the systems that we describe here, the lateral or the axial scanning is effectively realized by focusing different wavelengths of the supercontinuum to either different lateral or axial positions through purposely introduced chromatic dispersion and aberration respectively. As a result, the imaging speed can be greatly improved. We use this system to demonstrate the surface profile measurement of a microcircuit chip, with a sensitivity of 8.5 nm and a depth measurement range of about 7 microns.

Paper Details

Date Published: 16 December 2004
PDF: 8 pages
Proc. SPIE 5606, Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology II, (16 December 2004); doi: 10.1117/12.571595
Show Author Affiliations
Kebin Shi, The Pennsylvania State Univ. (United States)
Peng Li, The Pennsylvania State Univ. (United States)
Shizhuo Yin, The Pennsylvania State Univ. (United States)
Zhiwen Liu, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 5606:
Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology II
Kevin G. Harding, Editor(s)

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