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Proceedings Paper

Fabrication of varied-line-space grating by elastic optics
Author(s): Yongjun Xie; Shiping He; Shaojun Fu
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Paper Abstract

We demonstrate a method to fabricate varied-line-spacing grating by employing elastic medium with variable vertical section. The advantages of this technique include continuous diversity of variation of line-space, high fabrication efficiency and low cost, etc. It is very difficult or unrealizable to produce this variation of line-space by traditional interference lithography. This kind of grating can be used in the optical position sensor and it can improve the precision of the sensor.

Paper Details

Date Published: 7 February 2005
PDF: 4 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.571587
Show Author Affiliations
Yongjun Xie, Univ. of Science and Technology of China (China)
Shiping He, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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