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Proceedings Paper

Lithographic nanofabrication of optical cavities
Author(s): Guy A. DeRose; Marko Loncar; Mark L. Adams; Michael Hochberg; Axel Scherer
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Paper Abstract

Lithographic control over nanostructures has recently evolved to an accuracy that permits the sub-wavelength manipulation of light within high refractive index semiconductors. We have used this lithographic control to fabricate two-dimensional photonic crystal cavities and micro-ring resonators. Here we will show the fabrication techniques utilized for the construction of High-Q nanocavities and, in particular, focus on the influence of present-day lithographic and etching procedures on the performance of the cavities. Applications of these optical cavities range from communications to chemical sensing and we will describe the effects of geometry on the different applications. We show the use of optical cavities for the miniaturization of optical spectroscopy systems with ultra-high spatial and spectral resolution.

Paper Details

Date Published: 19 January 2005
PDF: 7 pages
Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571540
Show Author Affiliations
Guy A. DeRose, California Institute of Technology (United States)
Marko Loncar, Harvard Univ. (United States)
Mark L. Adams, ENSCO, Inc. (United States)
Michael Hochberg, California Institute of Technology (United States)
Axel Scherer, California Institute of Technology (United States)

Published in SPIE Proceedings Vol. 5592:
Nanofabrication: Technologies, Devices, and Applications
Warren Y-C. Lai; Stanley Pau; O. Daniel Lopez, Editor(s)

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