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Proceedings Paper

Laser systems for precision micromachining
Author(s): Marian Nowicki; Zygmunt J. Niechoda
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Paper Abstract

Two systems for laser precision micrornachining and some results of their work. are presented in this paper. These systems were de signed and constructed in the Institute of Microelectronics and Optoelectronics of Warsaw University of Technology.

Paper Details

Date Published: 1 August 1991
PDF: 8 pages
Proc. SPIE 1391, Laser Technology III, (1 August 1991); doi: 10.1117/12.57149
Show Author Affiliations
Marian Nowicki, Warsaw Univ. of Technology (Poland)
Zygmunt J. Niechoda, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 1391:
Laser Technology III

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