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Fabrication-limited design of a reconfigurable PBG MEMS waveguide device
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Paper Abstract

We report on our design and fabrication of a semiconductor based photonic bandgap nano-membrane device with MEMS features. This device could be used as a basic building block for a reconfigurable optoelectronic integrated circuit that can be reprogrammed for many different functionalities.

Paper Details

Date Published: 19 January 2005
PDF: 8 pages
Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571430
Show Author Affiliations
David M. Mackie, Army Research Lab. (United States)
Weimin Zhou, Army Research Lab. (United States)
Monica Taysing-Lara, Army Research Lab. (United States)
Gerard Dang, Army Research Lab. (United States)

Published in SPIE Proceedings Vol. 5592:
Nanofabrication: Technologies, Devices, and Applications
Warren Y-C. Lai; Stanley Pau; O. Daniel Lopez, Editor(s)

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