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Proceedings Paper

Design, fabrication, and characterization of whispering-gallery mode miniature sensors
Author(s): Haiyong Quan; Zhixiong Guo; Lei Xu; Stanley Pau
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Paper Abstract

In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.3μm-thick Si3N4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.

Paper Details

Date Published: 19 January 2005
PDF: 9 pages
Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571303
Show Author Affiliations
Haiyong Quan, Rutgers Univ. (United States)
Zhixiong Guo, Rutgers Univ. (United States)
Lei Xu, Rutgers Univ. (United States)
Stanley Pau, Lucent Technologies/Bell Labs. (United States)

Published in SPIE Proceedings Vol. 5592:
Nanofabrication: Technologies, Devices, and Applications
Warren Y-C. Lai; Stanley Pau; O. Daniel Lopez, Editor(s)

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