Share Email Print
cover

Proceedings Paper

Tunable stiffness scanning microscope probe
Author(s): Clemens Mueller-Falcke; Yong-Ak Song; Sang-Gook Kim
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Scanning probe microscopy (SPM) has been an important tool to image and manipulate micro/nano scale structures. The measurement is based on the optical detection of a very small deflection of a flexible cantilever while traveling near the sample surface. However, the use of a cantilever with a sharp oxidized conical tip is quite costly, very difficult to scale up and unable to scan variable hardness surfaces, such as cell membranes in vivo. A concept of in-plane probe tip is developed. It has a carbon nanotube tip, built-in actuator and a tip deflection sensor, all assembled in the same plane. Most of all, an in-plane probe design would enable the stiffness of the probe to become tunable by using MEMS clutched springs. This allows a continuous measurement of samples with inhomogeneous surface hardness without changing the probe in the middle of a measurement.

Paper Details

Date Published: 25 October 2004
PDF: 7 pages
Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); doi: 10.1117/12.571273
Show Author Affiliations
Clemens Mueller-Falcke, Massachusetts Institute of Technology (United States)
Yong-Ak Song, Massachusetts Institute of Technology (United States)
Sang-Gook Kim, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 5604:
Optomechatronic Micro/Nano Components, Devices, and Systems
Yoshitada Katagiri, Editor(s)

© SPIE. Terms of Use
Back to Top