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Proceedings Paper

Mechanical effects induced by adsorption and hybridization on micromechanical structures
Author(s): Fabien Amiot; Jean Paul Roger; Albert Claude Boccara
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Paper Abstract

An experimental set-up to measure the out-of-plane displacement field of surfaces in reflection microscopy is presented. It is derived from a Nomarski shear-interferometer. When the shear is greater than the length of the microcantilever, this interferometer, used with a sinusoidal phase modulation and four integrating buckets, allows one to obtain the displacement field of the observed surface, with a reproductibility in the 10 pm range. Identification techniques derived from the "Equilibrium Gap Method" developed recently to measure local mechanical properties and loading, the displacement field measured by the shear-interferometer may be used to determine simultaneously the "temperature" field and the local elastic properties of the cantilever. The feasibility of the in-situ (in water solution) full-field measurement of displacement fields in MEMS is proved, and preliminary results tends to show that mechanical effets induced by DNA hybridization are heterogeneous.

Paper Details

Date Published: 25 October 2004
PDF: 7 pages
Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004); doi: 10.1117/12.571192
Show Author Affiliations
Fabien Amiot, Laboratoire d'Optique Physique-CNRS, Ecole Superieure de Physique et Chimie Industrielles (France)
LMT Cachan-CNRS, and Ecole Normale Superieure de Cachan (France)
Jean Paul Roger, Laboratoire d'Optique Physique-CNRS and Ecole Superieure de Physique et Chimie Industrielles (France)
Albert Claude Boccara, Laboratoire d'Optique Physique-CNRS and Ecole Superieure de Physique et Chimie Industrielles (France)


Published in SPIE Proceedings Vol. 5602:
Optomechatronic Sensors, Actuators, and Control
Kee S. Moon, Editor(s)

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