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Proceedings Paper

Preparation of homogeneous ZrO2 films
Author(s): Dawei Zhang; Meiqiong Zhan; Weidong Gao; Shuzhen Shang; Yingjian Wang; Jianda Shao; Zhengxiu Fan
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Paper Abstract

Zirconium oxide films were prepared with and without ion beam assisted deposition (IBAD) by an electron beam. The effects of Ar-ion bombardment on the optical inhomogeneity of ZrO2 films deposited at room temperature were investigated. The results show that all samples are amorphous, and the refractive index of sample A without IBAD randomly changed with the film thickness, while the relative inhomogeneity of samples B, C, D with IBAD nearly zero. It was found that the energy of depositing molecule or atom had an important effect on the optical inhomogeneity of films, and the optical inhomogeneity of amorphous ZrO2 films could be improved by IBAD.

Paper Details

Date Published: 10 January 2005
PDF: 4 pages
Proc. SPIE 5623, Passive Components and Fiber-based Devices, (10 January 2005); doi: 10.1117/12.571035
Show Author Affiliations
Dawei Zhang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Meiqiong Zhan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Weidong Gao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Shuzhen Shang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Yingjian Wang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5623:
Passive Components and Fiber-based Devices
Yan Sun; Shuisheng Jian; Sang Bae Lee; Katsunari Okamoto, Editor(s)

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