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Proceedings Paper

Integration of metal-oxide nanobelts with microsystems for sensor applications
Author(s): Choongho Yu; Qing Hao; Li Shi; Xiangyang Kong; Zhong Lin Wang
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Paper Abstract

Single-crystalline tin dioxide (SnO2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

Paper Details

Date Published: 29 December 2004
PDF: 8 pages
Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); doi: 10.1117/12.570971
Show Author Affiliations
Choongho Yu, Univ. of Texas/Austin (United States)
Qing Hao, Univ. of Texas/Austin (United States)
Li Shi, Univ. of Texas/Austin (United States)
Xiangyang Kong, Georgia Institute of Technology (United States)
Zhong Lin Wang, Georgia Institute of Technology (United States)

Published in SPIE Proceedings Vol. 5593:
Nanosensing: Materials and Devices
M. Saif Islam; Achyut K. Dutta, Editor(s)

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