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Proceedings Paper

The study on the compound x-ray refractive lens using LIGA technique
Author(s): Jingqiu Liang; Zichun Le; Liangqiang Peng; Weibiao Wang; Weihua Lan; Anjie Ming; Futing Yi; Jian Ye; Bisheng Quan; Jinsong Yao; Ming Xuan; Lijun Wang
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Paper Abstract

A theoretical method of focusing X-rays by the compound X-ray refractive lens is presented in this paper. The authors report their resent theoretical results including the material selection and structure parameters for such a device. As an example, a compound X-ray refractive lens with PMMA material is designed. The detailed fabrication process of the PMMA compound lens by LIGA technology is described. Moreover, some measured results by means of SEM are also shown. The structure height of one of the PMMA compound lens is measured to be 500μm.

Paper Details

Date Published: 30 December 2004
PDF: 8 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.570760
Show Author Affiliations
Jingqiu Liang, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Zichun Le, Zhejiang Univ. of Technology (China)
Liangqiang Peng, Institute of High Energy Physics, CAS (China)
Weibiao Wang, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Weihua Lan, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Anjie Ming, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Futing Yi, Institute of High Energy Physics, CAS (China)
Jian Ye, Zhejiang Univ. of Technology (China)
Bisheng Quan, Zhejiang Univ. of Technology (China)
Jinsong Yao, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Ming Xuan, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Lijun Wang, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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