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Proceedings Paper

Performance analyzing and parameter revising for soft x-ray multilayer mirrors at E=60eV
Author(s): Limin Song; Shaocheng Li; Rongxi He
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Paper Abstract

In this paper, a Mo/Si multilayer mirror of normal incidence at E=60eV was firstly analyzed. From the measurement curves of a small angle x ray diffraction, the property of interfaces and the parameters including period thickness and roughness were gained. Through the analyzing, we found that performance is not good, the peak reflectivity is low and is not correspond with 60eV. Secondly, a revised design using Simulated Annealing arithmetic was applied in it. The revised design results shows a promising mirror at 60eV and are consistent with the results of the program of optical coating technology R&D center in Shanghai Institute of Optics and Fine Mechanics.

Paper Details

Date Published: 10 February 2005
PDF: 4 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.570556
Show Author Affiliations
Limin Song, Dalian Maritime Univ. (China)
Shaocheng Li, Dalian Nationality Univ. (China)
Rongxi He, Dalian Maritime Univ. (China)

Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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