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Proceedings Paper

Properties of spray pyrolysed SnO2:Sb films
Author(s): A. Arulgnanam; S. Balachandran; A. Balasubramanian
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Paper Abstract

Transparent conducting thin films of tin oxide, doped with antimony were prepared by spray pyrolytic process under controlled conditions on borosilicate glass substrates, using pentahydrate tin chloride (SnCl4 .5H20) as the starting material. Variations in parameters such as, the substrate temperature T5 and post-deposition annealing temperature TA were studied. Electrical and optical properties and x-ray diffraction studies of these films were studied to characterize these films.

Paper Details

Date Published: 1 February 1992
PDF: 7 pages
Proc. SPIE 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, (1 February 1992); doi: 10.1117/12.57036
Show Author Affiliations
A. Arulgnanam, Pondicherry Univ. (India)
S. Balachandran, Bishop Heber College (India)
A. Balasubramanian, Pondicherry Univ. (India)


Published in SPIE Proceedings Vol. 1523:
Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits
B. S. V. Gopalam; J. Majhi, Editor(s)

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