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Proceedings Paper

Laser-induced damage of single-crystalline silicon under different 1064-nm Nd:YAG laser modes
Author(s): WeiDong Gao; Meiqiong Zhan; Janda Shao; Zhengxiu Fan
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Paper Abstract

The Laser-induced damage behavior of single-Crystalline Silicon was investigated with a Nd:YAG laser at 1064nm under single-pulse mode and free-running mode. It was found that the damage behavior of the SCS showed strong dependence on the output mode of the incident laser. From the experimental and theoretical analysis, the damage mechanism under the two laser modes were given based on thermal and thermal-stress coupling models.

Paper Details

Date Published: 26 January 2005
PDF: 5 pages
Proc. SPIE 5627, High-Power Lasers and Applications III, (26 January 2005); doi: 10.1117/12.570313
Show Author Affiliations
WeiDong Gao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Meiqiong Zhan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Janda Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5627:
High-Power Lasers and Applications III
Dianyuan Fan; Ken-ichi Ueda; Jongmin Lee, Editor(s)

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