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Proceedings Paper

Patterning silicon surfaces with covalently attached DNA at submicrometer resolution
Author(s): Jian Hua Ouyang; Xin Sheng Zhao
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Paper Abstract

A procedure is developed to modify silicon surface by organic monolayer films with designed micrometer patterns of different chemical functionalities, which is based on the photolithography and photoactivated reaction of alkenes with Si-H on the hydrogen-terminated silicon surface. Subsequent chemical modification of the micro-pattern can be devised. As an illustration, DNA probe arrays are formed with the spatial resolution limited only by the current photolithography technology. The hybridization of the patterned probes with complementary targets is demonstrated through fluorescence detection. This method is applicable to high throughput biochips.

Paper Details

Date Published: 29 December 2004
PDF: 6 pages
Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); doi: 10.1117/12.570195
Show Author Affiliations
Jian Hua Ouyang, Peking Univ. (China)
Xin Sheng Zhao, Peking Univ. (China)


Published in SPIE Proceedings Vol. 5593:
Nanosensing: Materials and Devices
M. Saif Islam; Achyut K. Dutta, Editor(s)

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