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Proceedings Paper

Aging characteristics of CdSe thin films at low temperatures
Author(s): P. J. Sebastian; V. Sivaramakrishnan
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Paper Abstract

The aging (increase in film resistance with time) of CdSe thin films in oxygen and air at various substrate temperatures are reported. The films aged at low temperatures attained saturation in film resistance faster than those aged at higher substrate temperatures. This may be explained by considering the difference in the oxygen chemisorption rates in various films.

Paper Details

Date Published: 1 February 1992
PDF: 3 pages
Proc. SPIE 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, (1 February 1992); doi: 10.1117/12.57004
Show Author Affiliations
P. J. Sebastian, Indian Institute of Technology (India)
V. Sivaramakrishnan, Indian Institute of Technology (India)


Published in SPIE Proceedings Vol. 1523:
Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits
B. S. V. Gopalam; J. Majhi, Editor(s)

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