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Proceedings Paper

Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases
Author(s): Anna G. Kalyuzhnaya; Andrew V. Ryabtsev; Anatoliy I. Shchedrin
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Paper Abstract

The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF6 or CCI4 to nitrogen significantly increase the number of electrons in the energy range 2-6 eV which corresponds to the inverse part of the EEDF .In nitrogen with small admixtures of F2 or NF3, the EEDF differs slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules.

Paper Details

Date Published: 20 July 2004
PDF: 5 pages
Proc. SPIE 5507, XVI International Conference on Spectroscopy of Molecules and Crystals, (20 July 2004); doi: 10.1117/12.570023
Show Author Affiliations
Anna G. Kalyuzhnaya, Institute of Physics (Ukraine)
Andrew V. Ryabtsev, Institute of Physics (Ukraine)
Anatoliy I. Shchedrin, Institute of Physics (Ukraine)


Published in SPIE Proceedings Vol. 5507:
XVI International Conference on Spectroscopy of Molecules and Crystals
Galyna O. Puchkovska; Tatiana A. Gavrilko; Olexandr I. Lizengevich, Editor(s)

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