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Proceedings Paper

Electrical and optical properties of sprayed indium tin oxide films
Author(s): V. Vasu; A. Subrahmanyam
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Paper Abstract

The electrical and optical properties of sprayed indium tin oxide (ITO) films have been reported as a function of substrate temperature and tin concentration. Highly conducting (approximately equals 1 X 104 mho/cm) and transparent (approximately equals 90% in the visible region) ITO films were obtained when the substrate temperature is 420 degree(s)C with 5% by weight of tin. The refractive index of the films varies from 1.9 to 2.2.

Paper Details

Date Published: 1 February 1992
PDF: 3 pages
Proc. SPIE 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, (1 February 1992); doi: 10.1117/12.56982
Show Author Affiliations
V. Vasu, Indian Institute of Technology (India)
A. Subrahmanyam, Indian Institute of Technology (India)


Published in SPIE Proceedings Vol. 1523:
Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits
B. S. V. Gopalam; J. Majhi, Editor(s)

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