Share Email Print
cover

Proceedings Paper

Transparent materials microprocessing by nanosecond ultraviolet laser
Author(s): Guangzhi Zhu; Changhong Zhu; Xiao Yuan; Xiao Zhu; Peixiang Lu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Development of precision micro-fabrication techniques for transparent materials such as crystal quartz, sapphire, silica glass is strongly desired in various industrial. During laser ablation the quality of micro-fabrication depends strongly on the optical breakdown region induced by laser irradiation. In this work, nanosecond ultraviolet laser can be used to micro-process on the surface of silica glass and microcrystal glass in air. The experiments demonstrate that number of laser pulse, scanning velocity, laser wavelength and absorption index of these materials are important factors affecting quality of micro-fabrication using ultraviolet laser.

Paper Details

Date Published: 13 January 2005
PDF: 6 pages
Proc. SPIE 5629, Lasers in Material Processing and Manufacturing II, (13 January 2005); doi: 10.1117/12.569523
Show Author Affiliations
Guangzhi Zhu, Huazhong Univ. of Science and Technology (China)
Changhong Zhu, Huazhong Univ. of Science and Technology (China)
Xiao Yuan, Huazhong Univ. of Science and Technology (China)
Xiao Zhu, Huazhong Univ. of Science and Technology (China)
Peixiang Lu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 5629:
Lasers in Material Processing and Manufacturing II
ShuShen Deng; Akira Matsunawa; Y. Lawrence Yao; Minlin Zhong, Editor(s)

© SPIE. Terms of Use
Back to Top