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Proceedings Paper

Evaluation of practical properties of a spin-on-glass for a shifter of phase-shift masks
Author(s): Hiroyuki Miyashita; Koichi Mikami; Hisatake Sano
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Paper Abstract

Spin-on-glasses(SOGs) are excellent candidates for a shifter of phase shift masks. Four kinds of commercially available SOGs have been evaluated for use in i-line exposure. Each SOG had a high optical transmittance, and an adequate refractive index (ca. 1.44). However, only one of them, referred to as SOG: A hereafter, had enough durability against immersion in sulfuric acid for cleaning. The film cured at 200°C showed the above durability whereas that cured at 450°C did not The cause of the degradation was speculated from the FT-IR analysis. SOG:A also had (i) a low tensile stress( less than 5x108dyn/cm2 ) in its film, (ii) enough durability against scrubbing for cleaning, and (iii) good pattern profiles when fabricated by a dry-etching process. But, it had the two shortcomings; (i) poor durability against irradiation (at 200kJ/cm2) with i-line light, although this statement is based on the results of our preliminary experiment, (ii) poor step-coverage when its film was spin-coated over chrome patterns (because the thickness variation up to 20-30nm within a shifter pattern was observed). Implication of these shortcomings is discussed.

Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56949
Show Author Affiliations
Hiroyuki Miyashita, Dai Nippon Printing Co., Ltd. (Japan)
Koichi Mikami, Dai Nippon Printing Co., Ltd. (Japan)
Hisatake Sano, Dai Nippon Printing Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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