Share Email Print
cover

Proceedings Paper

Evaluation of practical properties of a spin-on-glass for a shifter of phase-shift masks
Author(s): Hiroyuki Miyashita; Koichi Mikami; Hisatake Sano
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56949
Show Author Affiliations
Hiroyuki Miyashita, Dai Nippon Printing Co., Ltd. (Japan)
Koichi Mikami, Dai Nippon Printing Co., Ltd. (Japan)
Hisatake Sano, Dai Nippon Printing Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

© SPIE. Terms of Use
Back to Top