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Proceedings Paper

Optimization of real phase-mask performance
Author(s): Franklin M. Schellenberg; David Levenson; Phillip J. Brock
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Paper Details

Date Published: 1 January 1992
PDF: 23 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56948
Show Author Affiliations
Franklin M. Schellenberg, IBM/Almaden Research Ctr. (United States)
David Levenson, IBM/Almaden Research Ctr. (United States)
Phillip J. Brock, IBM/Almaden Research Ctr. (United States)

Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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