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Proceedings Paper

Two-dimensional photomask standards calibration
Author(s): Wolfgang Haessler-Grohne; Hans-Helmut Paul
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Paper Details

Date Published: 1 January 1992
PDF: 12 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56945
Show Author Affiliations
Wolfgang Haessler-Grohne, Physikalisch-Technische Bundesanstalt (Germany)
Hans-Helmut Paul, Leica GmbH (Germany)


Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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