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Proceedings Paper

Zero-bias PBS process for 5X reticles
Author(s): Regine G. Tarascon-Auriol; Christophe Pierrat; Michael W. Stohl; Christopher P. Braun; James Burdorf; Sheila Vaidya
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Paper Details

Date Published: 1 January 1992
PDF: 14 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56944
Show Author Affiliations
Regine G. Tarascon-Auriol, AT&T Bell Labs. (United States)
Christophe Pierrat, AT&T Bell Labs. (United States)
Michael W. Stohl, AT&T Bell Labs. (United States)
Christopher P. Braun, AT&T Bell Labs. (United States)
James Burdorf, AT&T Bell Labs. (United States)
Sheila Vaidya, AT&T Bell Labs. (United States)


Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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