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Proceedings Paper

Reticle defect sizing and printability
Author(s): Brian J. Grenon; Karen D. Badger; Michael J. Trybendis
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Paper Details

Date Published: 1 January 1992
PDF: 17 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56943
Show Author Affiliations
Brian J. Grenon, IBM/General Technology Div. (United States)
Karen D. Badger, IBM/General Technology Div. (United States)
Michael J. Trybendis, IBM/General Technology Div. (United States)

Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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