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Proceedings Paper

New look at incoming pellicle inspection
Author(s): Robert W. Murphy; James A. Reynolds
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Paper Details

Date Published: 1 January 1992
PDF: 12 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56940
Show Author Affiliations
Robert W. Murphy, Apex Corp. (United States)
James A. Reynolds, Reynolds Consulting (United States)

Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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