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Proceedings Paper

Improved performance of a CORE-2100 through a joint development program
Author(s): Brett Schafman; Claudia H. Geller; C. Edward Franks
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Paper Details

Date Published: 1 January 1992
PDF: 12 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56935
Show Author Affiliations
Brett Schafman, ATEQ Corp. (United States)
Claudia H. Geller, ATEQ Corp. (United States)
C. Edward Franks, Micro Mask, Inc. (United States)


Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)

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