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Proceedings Paper

Photochemical etching and oxidation of GaSb stimulated by pulsed UV laser irradiations
Author(s): Etienne J. Petit; Y. Caudano; A. Gouskov; Georges Bougnot
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Paper Details

Date Published: 1 February 1992
PDF: 12 pages
Proc. SPIE 1593, Dry Etch Technology, (1 February 1992); doi: 10.1117/12.56926
Show Author Affiliations
Etienne J. Petit, Univ. Notre-Dame de la Paix (Belgium)
Y. Caudano, Univ. Notre-Dame de la Paix (Belgium)
A. Gouskov, Univ. des Sciences et des Techniques du Languedoc (France)
Georges Bougnot, Univ. des Sciences et des Techniques du Languedoc (France)


Published in SPIE Proceedings Vol. 1593:
Dry Etch Technology
Deepak Ranadive, Editor(s)

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