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Proceedings Paper

Etching of copper at high rates via generation of volatile copper species
Author(s): Kai-Ming Chi; Janos Farkas; Toivo T. Kodas; Mark J. Hampden-Smith
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Paper Details

Date Published: 1 February 1992
PDF: 4 pages
Proc. SPIE 1593, Dry Etch Technology, (1 February 1992); doi: 10.1117/12.56922
Show Author Affiliations
Kai-Ming Chi, Univ. of New Mexico (United States)
Janos Farkas, Univ. of New Mexico (United States)
Toivo T. Kodas, Univ. of New Mexico (United States)
Mark J. Hampden-Smith, Univ. of New Mexico (United States)


Published in SPIE Proceedings Vol. 1593:
Dry Etch Technology
Deepak Ranadive, Editor(s)

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