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Proceedings Paper

Application-specific integrated processing for ULSI
Author(s): James E. Nulty; Joseph A. Maher
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Paper Details

Date Published: 1 February 1992
PDF: 8 pages
Proc. SPIE 1593, Dry Etch Technology, (1 February 1992); doi: 10.1117/12.56920
Show Author Affiliations
James E. Nulty, Drytek (United States)
Joseph A. Maher, Drytek (United States)

Published in SPIE Proceedings Vol. 1593:
Dry Etch Technology
Deepak Ranadive, Editor(s)

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