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Proceedings Paper

In-situ auto ash: a key to reducing process-generated particles
Author(s): Zia Hasan; Joseph A. Maher; James E. Nulty; Larry Krynski
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Paper Details

Date Published: 1 February 1992
PDF: 9 pages
Proc. SPIE 1593, Dry Etch Technology, (1 February 1992); doi: 10.1117/12.56912
Show Author Affiliations
Zia Hasan, Drytek (United States)
Joseph A. Maher, Drytek (United States)
James E. Nulty, Drytek (United States)
Larry Krynski, Allied-Signal Inc. (United States)

Published in SPIE Proceedings Vol. 1593:
Dry Etch Technology
Deepak Ranadive, Editor(s)

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