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Proceedings Paper

Evaluation of silicon surface damage induced by plasma radiation
Author(s): Masahiro Yoneda; K. Kawai; Hiroshi Miyatake; Nobuo Fujiwara; K. Nishioka; Haruhiko Abe
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Paper Details

Date Published: 1 February 1992
PDF: 9 pages
Proc. SPIE 1593, Dry Etch Technology, (1 February 1992); doi: 10.1117/12.56910
Show Author Affiliations
Masahiro Yoneda, Mitsubishi Electric Corp. (Japan)
K. Kawai, Mitsubishi Electric Corp. (Japan)
Hiroshi Miyatake, Mitsubishi Electric Corp. (Japan)
Nobuo Fujiwara, Mitsubishi Electric Corp. (Japan)
K. Nishioka, Mitsubishi Electric Corp. (Japan)
Haruhiko Abe, Mitsubishi Electric Corp. (Japan)


Published in SPIE Proceedings Vol. 1593:
Dry Etch Technology
Deepak Ranadive, Editor(s)

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