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Proceedings Paper

Trends in gas sensors with tunable thin films
Author(s): Lawrence Domash; Mitchell Cohen; Matthias Wagner
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Paper Abstract

A new family of miniature nano-tunable narrowband infrared filters has been developed based on the thermo-optic properties of thin film semiconductors. Originally developed for fiber optic telecommunications networks at 1.5 μm, the technology has now been extended to the 3-5 μm range, leading to very compact tunable filters with passbands on the order of 0.5% of center wavelength and tuning ranges up to 4% of center wavelength. Two applications are described. First, a prototype carbon monoxide sensor testbed based on a 4550-4650 nm tunable filter is shown to be capable of detecting less than 20 ppm of CO. Second, we show how nano-tunable thin film filters can be integrated with miniature blackbody sources to create a new family of ultra low cost integrated tunable IR emitters, which we have named Firefly. Packaged in TO cans, Firefly devices enable precision detection of gases including carbon dioxide, carbon monoxide, sulphur dioxide, hydrogen cyanide, water vapor, nitric oxide or methane.

Paper Details

Date Published: 21 October 2004
PDF: 7 pages
Proc. SPIE 5563, Infrared Systems and Photoelectronic Technology, (21 October 2004); doi: 10.1117/12.569051
Show Author Affiliations
Lawrence Domash, Aegis Semiconductor, Inc. (United States)
Mitchell Cohen, Aegis Semiconductor, Inc. (United States)
Matthias Wagner, Aegis Semiconductor, Inc. (United States)


Published in SPIE Proceedings Vol. 5563:
Infrared Systems and Photoelectronic Technology
C. Bruce Johnson; Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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