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Proceedings Paper

Achieving microradian accuracy with silicon position-sensitive detectors
Author(s): Richard J. Gaughan
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Paper Details

Date Published: 1 February 1992
PDF: 11 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56854
Show Author Affiliations
Richard J. Gaughan, Lockheed Missiles & Space Co., Inc. (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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