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Proceedings Paper

Microvibration monitoring: some recent experiences in an operating microelectronics facility
Author(s): Kevin Hassett
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Paper Details

Date Published: 1 February 1992
PDF: 10 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56851
Show Author Affiliations
Kevin Hassett, Intel Corp. (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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