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Proceedings Paper

Vibration measurement techniques for advanced test and manufacturing facilities
Author(s): Randy O. Goucher; Dennis Smith
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Paper Abstract

Great strides were made during the 1980s in precision measurement and manufacturing technology. While the facilities that host these advanced processes are often different in design and function, a common concern arises in the operation of both. Excessive facility vibrations can have an adverse effect on both precision manufacturing and precision measurement operations. Frequently, vibration suppression or isolation systems are used to reduce the effects of facility vibrations on precision measurement or manufacturing equipment. The proper application of digital data acquisition and signal processing techniques can provide great insight into the influence of facility vibrations on these, and other precision operations. This paper reviews a set of techniques well suited for the measurement of facility vibrations and evaluating the need for and effectiveness of vibration isolation systems. An example of the application of these techniques to a particular facility is provided to demonstrate their use and show typical results.

Paper Details

Date Published: 1 February 1992
PDF: 12 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56846
Show Author Affiliations
Randy O. Goucher, Applied Technology Associates, Inc. (United States)
Dennis Smith, Applied Technology Associates, Inc. (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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