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Proceedings Paper

Vibration measurement techniques for advanced test and manufacturing facilities
Author(s): Randy O. Goucher; Dennis Smith
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Paper Details

Date Published: 1 February 1992
PDF: 12 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56846
Show Author Affiliations
Randy O. Goucher, Applied Technology Associates, Inc. (United States)
Dennis Smith, Applied Technology Associates, Inc. (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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