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Proceedings Paper

Review of several methods for processing vibration data
Author(s): Hal Amick; Sean K. Bui
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Paper Abstract

For many areas of acoustics, standards organizations or regulatory bodies have mandated vibration or noise criteria and defined the appropriate processing methods. No such standards exist for vibration-sensitive facilities at this time except as defined by equipment manufacturers, facility owners, and/or vibration consultants. The existing criteria from these groups differ widely in form. This paper reviews the various candidate methods offered by current technology for processing measured vibration data.

Paper Details

Date Published: 1 February 1992
PDF: 12 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56844
Show Author Affiliations
Hal Amick, Acentech Inc. (United States)
Sean K. Bui, Acentech Inc. (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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