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Proceedings Paper

Site selection considerations for scanning and transmission electron microscopes
Author(s): Wayne Vogen
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Paper Abstract

Environmental factors must be controlled including floor vibration, acoustic level and magnetic field when choosing a site for an electron microscope. A systematic procedure for selecting a site from possible candidates is presented in this paper.

Paper Details

Date Published: 1 February 1992
PDF: 5 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56840
Show Author Affiliations
Wayne Vogen, Vibration Engineering Consultants, Inc. (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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