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Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology
Author(s): Westwood K. W. Hong; Nicholas Boulter
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Paper Details

Date Published: 1 February 1992
PDF: 12 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56836
Show Author Affiliations
Westwood K. W. Hong, Arup Acoustics (Hong Kong)
Nicholas Boulter, Arup Acoustics (Hong Kong)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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