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Proceedings Paper

Design for vibration control in microelectronics facilities
Author(s): Roger Anderson
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Paper Abstract

This presentation reviews the evolution of the microelectronics industry in terms of sophistication of facility requirements as related to process equipment and the ever decreasing size of circuit features into the present sub-micron level.

Paper Details

Date Published: 1 February 1992
PDF: 6 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56835
Show Author Affiliations
Roger Anderson, American Institute of Architects (United States)

Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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