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Proceedings Paper

Site selection and design of a low-vibration building for submicron technology applications
Author(s): Alain Brochet; Jean Bernard
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Paper Details

Date Published: 1 February 1992
PDF: 13 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56834
Show Author Affiliations
Alain Brochet, SGS-Thomson Microelectronics (France)
Jean Bernard, SETEC Travaux Publics et Industriels (France)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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