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Proceedings Paper

Using wavelength change as a depth scanner to overcome the mechanical vibration in confocal scanning optical microscope
Author(s): Zhang Shen; ChunKan Tao; Xiaoliang Fu
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Paper Details

Date Published: 1 February 1992
PDF: 3 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56830
Show Author Affiliations
Zhang Shen, Haihui Electric Co. (China)
ChunKan Tao, Nanjing Univ. of Science and Technology (China)
Xiaoliang Fu, East China Institute of Technology (China)

Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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