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Proceedings Paper

New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope
Author(s): Zhang Shen; ChunKan Tao
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Paper Details

Date Published: 1 February 1992
PDF: 4 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56829
Show Author Affiliations
Zhang Shen, Haihui Electric Co. (China)
ChunKan Tao, Nanjing Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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