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Proceedings Paper

New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope
Author(s): Zhang Shen; ChunKan Tao
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Paper Abstract

In object scanning confocal microscopes the mechanical noises caused by the step motors have some effects on quality of image. This paper analyzes the mechanical noises and puts forward a new kind of system which isolates the vibration source from the scanning plate so as to minimize mechanical noises. The paper also gives some experiment results.

Paper Details

Date Published: 1 February 1992
PDF: 4 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56829
Show Author Affiliations
Zhang Shen, Haihui Electric Co. (China)
ChunKan Tao, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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