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Influence of bases and benches on the performance of vibration-sensitive equipment
Author(s): Colin G. Gordon; Yung Q. Tran
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Paper Details

Date Published: 1 February 1992
PDF: 14 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56828
Show Author Affiliations
Colin G. Gordon, Colin Gordon & Associates (United States)
Yung Q. Tran, Colin Gordon & Associates (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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