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Proceedings Paper

Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector
Author(s): Xunjun Qi; Bin Lin; Dongyan Chen; Yuqing Chen
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Paper Abstract

Position sensitive detectors (PSD) use the lateral photo effect to determine the centroid position of an incident light spot focused on it. A 65-pin ceramic packaged 4×4 arrayed position sensitive detector was fabricated first time as a new prototype of Hartmann-Shack wavefront sensor. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-inch <111> n-type high resistance crystal silicon substrate. A 100nm antireflection SiO2 thin film was formed on the surface and a multi-layer cover glass with transmissivity > 98% from 400nm to 950nm. The main parameters of the arrayed as wavefront detector, such as reverse voltage, dark current photosensitivity, response time were reported in the paper.

Paper Details

Date Published: 17 January 2005
PDF: 6 pages
Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); doi: 10.1117/12.568243
Show Author Affiliations
Xunjun Qi, Zhejiang Univ. (China)
Anhui Normal Univ. (China)
Bin Lin, Zhejiang Univ. (China)
Dongyan Chen, Zhejiang Univ. (China)
Yuqing Chen, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 5644:
Optoelectronic Devices and Integration
Hai Ming; Xuping Zhang; Maggie Yihong Chen, Editor(s)

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