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Proceedings Paper

Pathways to sub-10nm x-ray imaging using zone plate lens
Author(s): Wenbing Yun; Michael Feser; Alan F. Lyon; Frederick Duewer; Yuxin Wang
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Paper Abstract

The spatial resolution is a key optical parameter characterizing the performance of an imaging microscope. Zone plate based x-ray microscopy offers the highest spatial resolution over the whole electromagnet wave spectrum. Sub-20 nm resolution have been demonstrated with soft x-rays and sub-60 nm resolution have been obtained with multikeV x-rays using a laboratory source. There are two simple pathways to achieve sub-10 nm resolution x-ray imaging: (1) improving the fabrication technology to produce zone plates with an outermost zone width less than 10 nm and (2) using a higher diffraction order (such as the third diffraction order) of a currently available zone plate.

Paper Details

Date Published: 4 November 2004
PDF: 5 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.568199
Show Author Affiliations
Wenbing Yun, Xradia, Inc. (United States)
Michael Feser, Xradia, Inc. (United States)
Alan F. Lyon, Xradia, Inc. (United States)
Frederick Duewer, Xradia, Inc. (United States)
Yuxin Wang, Xradia, Inc. (United States)

Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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