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Proceedings Paper

Fabrication of 2D spatially addressable PDMS stamps for combinatorial patterning
Author(s): Quanguo He; Zhengchun Liu; Jianxin Tang; Libo Nie; Pengfeng Xiao; Nongyue He; Hong Chen
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Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, ; doi: 10.1117/12.568189
Show Author Affiliations
Quanguo He, Zhuzhou Institute of Technology (China)
Zhengchun Liu, Zhuzhou Institute of Technology (China)
Jianxin Tang, Zhuzhou Institute of Technology (China)
Libo Nie, Zhuzhou Institute of Technology (China)
Pengfeng Xiao, Zhuzhou Institute of Technology (China)
Nongyue He, Zhuzhou Institute of Technology (China)
Hong Chen, Zhuzhou Institute of Technology (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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