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Proceedings Paper

Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air
Author(s): De-Quan Yang; Edward Sacher; Michel Meunier
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Paper Abstract

SiOx microforest-like structures have been produced on Si (100) surfaces by pulsed excimer laser irradiation in air. Scanning electron microscopic observations have indicated these structures, which are composed of aggregated nanoparticles, to be 1-5 μm in diameter and 10-20 μm high, and to have the appearance of trees. XPS analysis has shown them to be composed of a-SiOx (1

Paper Details

Date Published: 9 December 2004
PDF: 6 pages
Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); doi: 10.1117/12.567860
Show Author Affiliations
De-Quan Yang, Ecole Polytechnique de Montreal (Canada)
Edward Sacher, Ecole Polytechnique de Montreal (Canada)
Michel Meunier, Ecole Polytechnique de Montreal (Canada)


Published in SPIE Proceedings Vol. 5578:
Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
Marc Nantel; Glen Herriot; Graham H. McKinnon; Leonard MacEachern; Robert A. Weersink; Rejean Munger; Andrew Ridsdale, Editor(s)

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