Share Email Print
cover

Proceedings Paper

A surface micromachined amorphous GexSi1-xOy bolometer for thermal imaging applications
Author(s): A. H. Z. Ahmed; R. N. Tait; Tania B. Oogarah; H. C. Liu; Mike W. Denhoff; G. I. Sproule; M. J. Graham
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We present characterization of a surface micro-machined microbolometer featuring a number of unique features. The active resistor layer is amorphous GexSi1-xOy grown by reactively co-sputtering Ge and Si in an oxygen background. Complete control over Ge, Si, and O content using this technique allows control of both temperature coefficient of resistance and resistivity of the material, enabling optimization of material characteristics for bolometer applications. The resistor layer is combined with top and bottom NiCr metalization to form a tuned absorber for 10 μm radiation, eliminating requirements for additional absorber layers or for carefully controlled air gap thickness. Characterization of device noise and performance is presented.

Paper Details

Date Published: 9 December 2004
PDF: 11 pages
Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); doi: 10.1117/12.567612
Show Author Affiliations
A. H. Z. Ahmed, Carleton Univ. (Canada)
R. N. Tait, Carleton Univ. (Canada)
Tania B. Oogarah, National Research Council (Canada)
H. C. Liu, National Research Council (Canada)
Mike W. Denhoff, National Research Council (Canada)
G. I. Sproule, National Research Council (Canada)
M. J. Graham, National Research Council (Canada)


Published in SPIE Proceedings Vol. 5578:
Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
Marc Nantel; Glen Herriot; Graham H. McKinnon; Leonard MacEachern; Robert A. Weersink; Rejean Munger; Andrew Ridsdale, Editor(s)

© SPIE. Terms of Use
Back to Top